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MEXT (Ministry of Education, Culture, Sports, Science and
Technology) Knowledge Cluster Initiative (The Second Stage)
～ Tokai Region Nanotechnology Manufacturing Cluster ～ |
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2nd International Symposium on Advanced
Plasma Science and its Applications for Nitrides and Nanomaterials |
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March
7-10, 2010
Meijo University, Nagoya, Japan
| Organizing Committee Chairperson: |
Masaru
Hori, Plasma Nanotechnology Research Center, Nagoya University |
| Vice-Chairperson: |
Hideki Masuda,
Nagoya Institute of Technology
Hiroshi Amano, Meijo University
Keiji Nakamura, Chubu University |
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| With your kind cooperation and support towards ISPlasma2010 at Meijo University in Nagoya, the symposium was successfully closed with a total of 600 participants. We sincerely appreciate your kind attendance and cooperation, and hope to future
opportunity to meet you. |
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| The ISPlasma2010 will be held as part of the International Program
of the Second Stage Knowledge Cluster Project (Tokai Region Nanotechnology Manufacturing
Cluster) to establish an Advanced Plasma Nanotechnology Science Research Foundation
in the Tokai region. The symposium is focused on at advanced plasma science and
technology and its applications for Nitrides and Nanomaterials. Fields of focus
within this symposium include plasma diagnostics/monitoring, sputtering, etching,
deposition, surface modification and simulation. In addition, the conference
will include plasma applications such as processing of Si or group III nitrides
for nano-size semiconductors or similar nano-materials. During this symposium,
the effective technological collaboration between industry-academia-government
will also be discussed with the aim of establishing in the future an Advanced
Plasma Science and Technology Center in the region that will collaborate with
world-wide research institutes. |
| Sponsored
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Aichi Science & Technology Foundation |
| Co-sponsored
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Aichi Prefecture, Nagoya City, Gifu
Prefecture ,Nagoya University, Nagoya institute of Technology, Meijo University,
Chubu University, The Japan Society of Applied Physics, The Japan Society of
Plasma Science and Nuclear Fusion Research |
| Supported by |
The 162nd Committee on Wide Bandgap
Semiconductor Photonic and Electronic
Devices, Japan Society for the Promotion of Science
Mie Prefecture, Gifu University,
Toyohashi University of Technology, Toyota Technological Institute, Mie University,
Japan Fine Ceramics Center, National Institute for Fusion Science, Chubu Bureau
of Economy Trade and Industry , Chubu Economic Federation, Nagoya Chamber of
Commerce & Industry, Gifu Industries’ Association, Nagoya Industrial Science Research Institute, Nagoya City Association for Industrial Technology, Nagoya Urban Industries Promotion Corporation, Gifu Research & Development
Foundation, Chubu Industrial and Regional Advancement Center, Tokai Monodukuri Council, Greater Nagoya Initiative Center (GNIC), Aichi Industrial Research Association,
Nagoya University Supportive Organization, Research Cooperation Association of NIT,
Japan Society
of Electromagnetic Wave Energy Applications(JEMEA), The Forum for Atomic and
Molecular Data and Their Applications |
| Grants |
Daiko Foudation, Resragch Foundation for the Electrotechnology of Chubu |
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