A-2 Plasma Deposition
Session Organizer
Representative
Naho ITAGAKI, Kyushu Univ.Co-organizers
Makoto KAMBARA, The University of TokyoSong-Yun KANG, Tokyo Electron Limited
Hisao MAKINO, Kochi University of Technology
Invited Speakers
Makio UWAHA, Nagoya Univ.Nobuyoshi KOBAYASHI, ASM
Topics
・Plasma CVD・Plasma Control