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MEXT (Ministry of Education, Culture, Sports, Science and Technology) Knowledge Cluster Initiative (The Second Stage)
～ Tokai Region Nanotechnology Manufacturing Cluster ～ |
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First International Symposium on |
| Advanced Plasma Science and its Applications |
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March 8-11, 2009
IB Building, Nagoya University, Nagoya, Japan
Organizing Committee Chairperson : Masaru Hori
Vice Director, Plasma Nanotechnology Research Center, Nagoya University |
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Symposium Scope
| The ISPlasma2009 will be held as part of the International Program of the Second Stage Knowledge Cluster Project (Tokai Region Nanotechnology Manufacturing Cluster) to establish an Advanced Plasma Nanotechnology Science Research Foundation in the Tokai region. The symposium is focused on at advanced plasma science and technology and its applications. Fields of focus within this symposium include plasma diagnostics/monitoring, sputtering, etching, deposition, surface modification and simulation. In addition, the conference will include plasma applications such as processing of Si or group III nitrides for nano-size semiconductors or similar nano-materials. During this symposium, the effective technological collaboration between industry-academia-government will also be discussed with the aim of establishing in the future an Advanced Plasma Science and Technology Center in the region that will collaborate with world-wide research institutes. |
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