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Mo-1 |
Plasma-Enhanced Chemical Vapor Deposition of Amorphous Carbon in Atmospheric Pressure
Y. Matsudaira1, H. Inui1, T. Kino1, H. Kano2, K. Takeda1, M. Sekine1, and M. Hori1
1Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Japan
2NU Eco-Engineering Co., Ltd., Japan |
Mo-2 |
High Accuracy Plasma Etching Process Employing Real Time Monitoring of Substrate Temperature
H. Kuroda1, H.Yamamoto2, M. Ito3, T. Ohta3, K. Takeda2, M. Sekine2, 4, and M. Hori2, 4
1Department of Quantum, Nagoya University, Japan
2Department of Electrical Engineering and Computer Science, Nagoya University, Japan
3Department of Opto-Mechatronics, Wakayama University, Japan
4JST-CREST, Japan |
Mo-3 |
Development of High Density Nitrogen Radical Source and Behaviors of Atomic Radicals
S. Chen1, H. Kano2, S. Den3, S. Takashima4, K. Takeda1, and M. Hori1
1Department of Electrical Engineering and Computer Science, Nagoya University, Japan
2NU Eco-Engineering Co., Ltd., Japan
3Katagiri Engineering Co., Ltd., Japan
4Nagoya Urban Industries Promotion Co., Japan |
Mo-4 |
Growth of Carbon Nanowalls of High Graphitization Employing PECVD
W. Takeuchi1, M. Hiramatsu2, H. Kano3, Y. Tokuda4, and M. Hori1
1Department of Electrical Engineering and Computer Science, Nagoya University, Japan
2Department of Electrical Engineering, Meijo University, Japan
3Department of Electrical Engineering, Aichi Institute of Technology, Japan
4NU Eco-Engineering Co., Ltd., Japan |
Mo-5 |
Absolute Density of Hydrogen Atoms in the High Pressure VHF Capacitively Coupled Plasma for Solar Cell Devices
Y. Abe1, S. Kawashima1, K. Takeda1, M. Sekine2, 3, and M. Hori1, 2, 3
1Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Japan
2Plasma Nanotechnology Research Center, Japan
3JST-CREST, Japan |
Mo-6 |
Laser Thomson Scattering Measurements of Microplasmas
Y. Kawamura, Y. Harada, K. Fukuyama, M. Aramaki, and A. Kono
Department of Electrical Engineering and Computer Science, Nagoya University, Japan |
Mo-7 |
Microwave Plasma Control with Use of Multi-Hollow Dielectric Plate
S. Ohta, T. Sano, Y. Liang, K. Nakamura, and H. Sugai
Department of Electronics & Information Engineering, Chubu University, Japan |
Mo-8 |
Diagnostics of RF Magnetron Sputtering Plasma for Synthesizing Indium-Zinc-Oxide Film
T. Ohta1, N. Takota1, M. Ito1, Y. Higashijima2, H. Kano3, S. Den4, and M. Hori5
1Faculty of Systems Engineering, Wakayama University, Japan
2NU System CO., LTD., Japan
3NU EcoEngineering CO., LTD., Japan
4Katagiri Engineering CO., LTD., Japan
5Department of Electrical Engineering and Computer Science, Nagoya University, Japan |
Mo-9 |
Diagnostics of Non-Equilibrium Atmospheric Pressure Plasma for Penicillium Digitatum Disinfection
S. Iseki1, T. Ohta1, M. Ito1, Y. Higashijima2, H. Kano 3, and M. Hori4
1Faculty of Systems Engineering, Wakayama University, Japan
2NU System CO., LTD., Japan
3NU EcoEngineering CO., LTD., Japan
4Department of Electrical Engineering and Computer Science, Nagoya University, Japan
|
Mo-10 |
Influence of Polymer Depositon on Electron Monitoring with Frequency Shift Probes
Q. Zhang, K. Nakamura, and H. Sugai
Department of Electrical Engineering, Chubu University, Japan |
Mo-11 |
Basic Experiment on Microcrystalline Silicon Film Deposition by 915 MHz Microwave Plasma CVD
H. Asano1, T. Ishijima2, and H. Toyoda1,2
1Department of Electrical Engineering and Computer Science, Nagoya University
2Plasma Nanotechnology Research Center, Nagoya University, Japan |
Mo-12 |
Development of High-Power and Compact Electron-Beam-Excited-Plasma (EBEP) Source
R. Ichiki and T. Hara
Toyota Technological Institute, Japan |
Mo-13 |
Effect of Micro-Scale Young’s Modulus on Adhesion Property of Plasma Treated Rubber Surface
J.H. Kim1, H. Kousaka1, N. Umehara1, I. Nitta2, M. Shimada3 , and M. Hasegawa3
1Department of Mechanical Science and Engineering, Nagoya University, Japan
2Graduate School of Science and Technology, Niigata University, Japan
3Nipro Corporation, Research and Development Laboratory, Japan |
Mo-14 |
Nanoscale Friction and Adhesion Behaviors of Double Roughening Diamond-like Carbon Film with Various Humidity
Y. Jang, H. Kousaka, and N. Umehara
Advanced Materials and Manufacturing Laboratory, Department of Mechanical Science and Engineering, Nagoya University, Japan |
Mo-15 |
Aerosol Plasma (Plasma Processor for Aerosol Powder)
F. Hori1, M. Hori2
1Alpha Co., Ltd., Japan
2Plasma Nanotechnology Research Center, Nagoya University, Japan |
Mo-16 |
Laser Measurement for Hydrolysis of TTIP Solution
S. Ikezawa, M. Hayakawa, and S. Parajulee
Department of Electrical & Electronic Engineering, Chubu University, Japan |
Mo-17 |
Adhesion of Ti (O, N) Coatings on Glass
S. Parajulee, M. Hayakawa, and S. Ikezawa
Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chubu University,Japan |
Mo-18 |
Ca Ordering in Ca0.33CoO2 Thin Films for Thermoelectric Applications
R. Huang1, T. Mizoguchi2, K. Sugiura3, H. Ohta3, K. Koumoto3, T. Hirayama1, and Y. Ikuhara1, 2
1Nanostructures Research Laboratory, Japan Fine Ceramics Center, Japan
2Institute of Engineering Innovation, the University of Tokyo, Japan
3Graduate School of Engineering, Nagoya University, Japan |
Mo-19 |
Reactive Plasma Nitriding of Al Powders in Atmospheric Plasma Spray
M. Shahien, M. Yamada, T. Yasui, and M. Fukumoto
Toyohashi University of Technology, Japan |
Mo-20 |
Liquid Immersion Angled Exposure Technique for 3D Photolithography
T. Hosono, S. Kumagai, and M. Sasaki
Toyota Technological Institute, Japan |
Mo-21 |
Micromirror Realized by Combined Surface and Bulk Micromachining using Isotropic and Anisotropic Si Etching
M. Sasaki1, S. Kumagai1, and K. Hane2
1Toyota Technological Institute, Japan
2Tohoku University, Japan |
Mo-22 |
Production and Evaluation of Epoxy Composites with Carbon Nanotube
T. Suzuki, S. Inoue, K. Nojima, B. Chen, H. Minoura, and Y. Ando
Department of Materials Science & Engineering, Meijo University, Japan |
Mo-23 |
Purification of Single-wall Carbon Nanotubes by Fenton's Reaction
T. Suzuki, S. Inoue, and Y. Ando
Department of Materials Science & Engineering, Meijo University, Japan |
Mo-24 |
Fabrication of Carbon Nanostructure using Radical Injection Plasma Enhanced Chemical Vapor Deposition and Its Electrochemical Evaluation
H. Watanabe1, M. Hiramatsu1, and M. Hori2
1Department of Electrical and Electronic Engineering, Meijo University, Japan
2Department of Electrical Engineering and Computer Science, Nagoya University, Japan |
Mo-25 |
Direct Growth of Carbon Nanotube Films by DC Arc Discharge Plasma
H. Wang1, Z. Li2, S. Inoue1, and Y. Ando1
1Department of Materials Science & Engineering, Meijo University, Japan
2Department of Mechanics, Zhejiang University, China |
Mo-26 |
Fabrication of Bridge-shaped Carbon Nanowall on Trench Substrates Using Electron Beam Excited Plasma Enhanced CVD
H. Mikuni1, W. Takeuchi1, M. Hiramatsu2, H. Kano3, Y. Tokuda4, K. Takeda1, and M. Hori1
1Department of Electrical Engineering and Computer Science, Nagoya University, Japan
2Department of Electrical and Electronic Engineering, Meijo University, Japan
3NU Eco-Engineering Co., Ltd., Japan
4Department of Electrical and Electronics Engineering, Aichi Institute of Technology, Japan |
Mo-27 |
Synthesis of Platinum Nanoparticles on Carbon Nanowalls by Employing Supercritical Carbon Dioxide
K. Mase1, T. Machino2 , H. Kano3 , M. Hiramatsu3, M. Sekine1 , and M. Hori1
1Department of Electrical Engineering and Computer Science, Nagoya University, Japan
2 NU EcoEngineering, Co., LTD., Japan
3Department of Electrical and Electronic Engineering, Meijo University, Japan |
Tu-1 |
Production of Gold Nanoparticles by Picosecond Laser Ablation in Liquids: (1) Solvents Effect on Structure and Surface Properties
G. Satomi, H. Kato, and H. Yui
Department of Chemistry, Faculty of Science, Tokyo University of Science, Japan |
Tu-2 |
Production of Gold Nanoparticles by Picosecond Laser Ablation in Liquids: (2) Investigation of Its Primary Process by Electron-enhanced Raman Scattering
H. Kato, G. Satomi, Y. Someya, and H. Yui
Department of Chemistry, Faculty of Science, Tokyo University of Science, Japan |
Tu-3 |
Surface Modification of Single-Walled Carbon Nanotubes for Electric Double-Layer Capacitor Electrodes
S. Kawasaki, Y. Suzuki, T. Kawashita, and I. Mukhopadhyay
Department of Materials Science & Technology, Nagoya Institute of Technology, Japan |
Tu-4 |
Sensing VOCs by using the Organic-Inorganic Nanocomposite
T. Sawaki, N. Ohata, T. Inomata, Y. Funahashi, T. Ozawa, and H. Masuda
Department of Applied Chemistry, Nagoya Institute of Technology, Japan |
Tu-5 |
Adsorbing and Sensing Microbes by Artificial Siderophores-Modified Au Substrates
H. Tanabashi, T. Inomata, H. Eguchi, Y. Funahashi, T. Ozawa, and H. Masuda
Department of Applied Chemistry, Nagoya Institute of Technology, Japan |
Tu-6 |
Dioxygen Activation by Non-Heme Diiron Complex-Modified Electrode.
T. Inomata, Y. Hayashi, K. Shinozaki, Y. Funahashi, T. Ozawa, and H. Masuda
Department of Applied Chemistry, Nagoya Institute of Technology, Japan |
Tu-7 |
Visible Light-Induced Catalytic Oxidation by using the Organic-Inorganic Nanocomposite
Y. Nagai, N. Ohata, T. Inomata, Y. Funahashi, T. Ozawa, and H. Masuda
Department of Applied Chemistry, Nagoya Institute of Technology, Japan |
Tu-8 |
Preparation and Characterization of A Square Planar Ru Complex Immobilized into Meso-porous Silica Material FSM-16 and The Improvement in Epoxidation Selectivity
T. Okumura1, H. Takagi2, Y. Funahashi1, T. Ozawa1, K. Jitsukawa1, Y. Fukushima2, and H. Masuda1,
1Department of Frontier Materials, Graduate School of Engineering, Nagoya Institute of Technology, Japan
2TOYOTA, Central R&D Labs. Inc., Japan |
Tu-9 |
Triarylamine-Functionalized Ruthenium Dyes for Efficient Dye-Sensitized Solar Cells
Z. Jin1, H. Masuda1, N. Yamanaka2, and M. Minami2
1Department of Applied Chemistry, Graduate School of Engineering, Nagoya Institute of Technology, Japan
2Central Technical Research Laboratory, Nippon Oil Corporation, Japan |
Tu-10 |
Crystal Growth of A-plane GaN on a Patterned (110) Si Substrate by Selective MOVPE
T. Tanikawa, Y. Honda, M. Yamaguchi, and N. Sawaki
Department of Electronics & Akasaki Research Center, Nagoya University, Japan |
Tu-11 |
Selective Growth of (1-101)GaN on Large Size Si Substrate with SiO2 Mask Deposited by Oblique EB Evaporation
Y. Honda, T. Tanikawa, M. Yamaguchi, and N. Sawaki
Department of Electronics & Akasaki Research Center, Nagoya University, Japan |
Tu-12 |
In Situ Moritoring on MOVPE Growth of Nitride Semiconductors
M. Narukawa, Y. Ogawahara, H. Miyake, and K. Hiramatsu
Department of Electrical and Electronic Engineering, Mie University, Japan |
Tu-13 |
Low-Pressure HVPE Growth of Thick AlN on Trench-Patterned Substrate
K. Okuura, Y. Katagiri, H. Miyake, and K. Hiramatsu
Department of Electrical and Electronic Engineering, Mie University, Japan |
Tu-14 |
Optical Properties of InGaN/GaN Stripe Structure Grown on (111)Si
B. Kim, T. Tanikawa, Y. Honda, M. Yamaguchi, and N. Sawaki
Department of Electronics & Akasaki Research Center, Nagoya University, Japan |
Tu-15 |
Etching of GaN by Plasma Chemical Vaporization Machining
Y. Nakahama1, 2, N. Kanetsuki1, T. Funaki1, M. Kadono1, Y. Sano3, K. Yamamura2, K. Endo2, and Y. Mori2
1SHARP Corporation, Japan
2Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Japan
3Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Japan |
Tu-16 |
Demonstration of AlGaN-based Deep-UV LEDs on AlN Templates
Y. Sakai1, Y. Zhu1, T. Egawa1, S. Sumiya2, M. Miyoshi2, and M. Tanaka2
1Research Center for Nano-Device and System, Nagoya Institute of Technology, Japan
2NGK Insulators, LTD., Japan |
Tu-17 |
Gate Controllable Light Emitting Device Based-on Rare Earth Ion Doped AlGaN/GaN HEMT
T. Hata1, H. Okada1, Y. Furukawa1, A. Wakahara1, Y. Takagi2, S. Sato3, and T. Ohshima3
1Department of Electrical & Electronic Engineering, Toyohashi University of Technology, Japan
2Hamamatsu Photonics K.K., Japan
3Japan Atomic Energy Agency, Japan |
Tu-18 |
Plasma Oxidized Aluminum at the Schottky of AlGaN/GaN HEMTs to Suppress Current Collapse and Gate Leakage
S.L. Selvaraj and T. Egawa
Research Center for Nano-Device and System, Nagoya Institute of Technology, Japan |
Tu-19 |
High-Performance Photodetector Based on AlGaN/GaN Hetero-Field-Effect Transistors with P-GaN Gate
M. Iwaya, S. Kamiyama, H. Amano, and I. Akasaki
Department of Materials Science & Engineering, Meijo University, Japan |
Tu-20 |
Fabrication of Biomedical Ti/βTCP Composite by Spark Plasma Sintering Method
Y. Sunayama1, H. Sato2, Y. Watanabe3, E. Miura4, and E. Kobayashi5
1Department of Mechanical Engineering, Nagoya Institute of Technology, Japan
2Department of Techno-Business Administration, Nagoya Institute of Technology, Japan
3Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology, Japan
4Department of Developmental and Reconstructive Medicine, Nagasaki University, Japan
5Department of Metallurgy & Ceramics Science, Tokyo Institute of Technology, Japan |
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