A-2 Plasma Deposition

Session Organizer

Representative

Naho ITAGAKI, Kyushu Univ.

Co-organizers

Makoto KAMBARA, The University of Tokyo
Song-Yun KANG, Tokyo Electron Limited
Hisao MAKINO, Kochi University of Technology

Invited Speakers

Makio UWAHA, Nagoya Univ.
Nobuyoshi KOBAYASHI, ASM

Topics

・Plasma CVD
・Plasma Control

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